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Experimental studies of complex crater formation under cluster implantation of solids
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- Prasalovich, Sergei, 1976 (author)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),Department of Physics, Göteborg University, 41296 Göteborg, Sweden
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- Popok, Vladimir, 1966 (author)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),Department of Physics, Göteborg University, 41296 Göteborg, Sweden
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- Persson, Per (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- (creator_code:org_t)
- Springer Science and Business Media LLC, 2005
- 2005
- English.
- In: European Physical Journal D. - : Springer Science and Business Media LLC. - 1434-6060 .- 1434-6079. ; 36, s. 79-88
- Journal article (peer-reviewed)
Abstract
Subject headings
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- The results of a systematic study of surface defect formation after energetic Arn+ (n = 12, 22, 32, 54) and Xen+ (n = 4, 16) cluster ion implantation into silicon and sapphire are presented. Implantation energies vary from 3 to 18 keV/ion. Two cases of comparative studies are carried out: the same cluster species are implanted into two different substrates, i.e. Arn+ cluster ions into silicon and sapphire and two different cluster species Arn+ and Xen+ are implanted into the same kind of substrate (silicon). Atomic force, scanning electron and transmission electron microscopies (AFM, SEM and TEM) are used to study the implanted samples. The analysis reveals the formation of two types of surface erosion defects: simple and complex (with centrally positioned hillock) craters. It is found that the ratio of simple to complex crater formation as well as the hillock dimensions depend strongly on the cluster species, size and impact energy as well as on the type of substrate material. Qualitative models describing the two comparative cases of cluster implantation, the case of different cluster species and the case of different substrate materials, are proposed.
Subject headings
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Nanoscale materials: clusters
- nanoparticles
- nanotubes
- and nanocrystals - 61.80.Lj Atom and molecule irradiation effects - 68.37.-d Microscopy of surfaces
- interfaces
- and thin films
- TECHNOLOGY
Publication and Content Type
- ref (subject category)
- art (subject category)
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