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Nanohillock formati...
Nanohillock formation by impact of small low-energy clusters with surfaces
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- Popok, Vladimir, 1966 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Prasalovich, Sergei, 1976 (författare)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),University of Gothenburg
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- Campbell, Eleanor E B, 1960 (författare)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),University of Gothenburg
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: Nuclear Instruments and Methods in Physics Research B. ; 207:2, s. 145-153
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Abstract
Ämnesord
Stäng
- Results on nanoscale structuring of different substrates (silicon, pyrolytic graphite, indium-tin-oxide) using clusters from 20 to 100 atoms in size formed from gaseous precursors (O2, N2, Ar) at relatively low impact energy up to 15 keV are presented. Images of the substrate surfaces after cluster collisions obtained using atomic force microscopy (AFM) show the formation of hillocks from a few to 15 nm height with a basal diameter from 50 to 300 nm depending on implantation conditions. The shape and size of the structures are found to be a function of the cluster size and species, implantation energy, impact angle and the type of substrate. A model explaining the hillock formation is discussed.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- cluster source
- cluster ion implantation
- nanosize hillock
- atomic force microscopy
- nanosize hillock
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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