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Electroluminescence from silicon p-n junctions prepared by wafer bonding

Sveinbjörnsson, Einar, 1964 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Bengtsson, Stefan, 1961 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Weber, J. (author)
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Keskitalo, N. (author)
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 (creator_code:org_t)
1998
1998
English.
In: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications. ; , s. 264-
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • We report on electro- and photoluminescence from silicon p-n diodes formed by hydrophobic wafer bonding. Four main spectral features associated with the bonded interface are detected at photon energies between 0.8 and 0.9 eV. Two of these signals are identified as the dislocation-related signals D1 and D2 while two peaks at 0.83 eV and 0.89 eV remain unidentified. However, we observe a signal similar to the 0.83 eV signal in polysilicon and at the junction of a silicon bicrystal

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

dislocations
wafer bonding
semiconductor diodes
bicrystals
photoluminescence
electroluminescence
elemental semiconductors
p-n junctions
silicon
surface chemistry

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