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Low density of near-interface traps at the Al2O3/4H-SiC interface with Al2O3 made by low temperature oxidation of Al
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- Khosa, Rabia Y. (author)
- Háskóli Íslands,University of Iceland,Science Institute, University of Iceland, IS-107 Reykjavík, Iceland
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- Sveinbjörnsson, Einar, 1964- (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten,Science Institute, University of Iceland, IS-107 Reykjavík, Iceland
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- Winters, Michael, 1986 (author)
- Chalmers tekniska högskola,Chalmers University of Technology,Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-41296 Göteborg, Sweden
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- (creator_code:org_t)
- ISBN 9783035710434
- Trans Tech Publications Ltd, 2017
- 2017
- English.
- In: Materials Science Forum. - : Trans Tech Publications Ltd. - 1662-9752 .- 0255-5476. - 9783035710434 ; 897 MSF, s. 135-138, s. 135-138
- Conference paper (peer-reviewed)
Abstract
Subject headings
Close
- We report on a very low density (
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Near-interface traps
- Interface states
- Aluminum oxide
- Gate dielectrics
Publication and Content Type
- kon (subject category)
- ref (subject category)
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