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The influence of wafer dimensions on the contact wave velocity in silicon wafer bonding
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- Ljungberg, Karin (author)
- Vedde, Jan (author)
- (creator_code:org_t)
- 1996
- 1996
- English.
- In: Applied Physics Letters. ; 69:22, s. 3381-3383
- Journal article (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- ref (subject category)
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