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Thermal Analysis of an Au/Pt/Ti-Based Microheater
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- Zhang, Yong, 1982 (author)
- Shanghai University
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- Yu, Chen (author)
- Shanghai University
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- Yang, Fei (author)
- Shanghai University
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- (creator_code:org_t)
- 2021
- 2021
- English.
- In: 2021 23rd European Microelectronics and Packaging Conference and Exhibition, EMPC 2021.
- Conference paper (peer-reviewed)
Abstract
Subject headings
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- A thin film Gold/Platinum/Titanium (Au/Pt/Ti) - based microheater with pectination construction and a four-point probe was fabricated on a silica substrate. A standard lithography process was used to transfer the circuit pattern onto the substrate, and then Au/Pt/Ti was deposited on the substrate by an evaporator. Standard calibration was carried out at various temperatures, which can be obtained the relationship between the temperature and the resistance of the microheater, the results show that the Au/Pt/Ti-based microheater has a good linear relationship between the temperature and the resistance, indicating the microheater can also be used as a temperature sensor. Furthermore, the effects of different input powers, the geometry, and the thickness of the thin-film metals of the microheater were investigated and discussed. Finally, a finite element model was set up to see the temperature distribution of the microheater after the electric potential is applied.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Microheater
- Au/Pt/Ti
- Calibration
- Thermal
Publication and Content Type
- kon (subject category)
- ref (subject category)
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- Liu, Johan, 1960
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- Chalmers University of Technology
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