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Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
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- Hedsten, Karin, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Karlén, David, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- 2006
- 2006
- English.
- In: Jornal of Micromechanics and Microengineering. ; 16:6, s. S88-S95
- Journal article (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- ref (subject category)
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