Sökning: onr:"swepub:oai:DiVA.org:kth-20236" >
Self-interstitial m...
Self-interstitial migration during ion irradiation of boron delta-doped silicon
-
Kuznetsov, A. Y. (författare)
-
Leveque, P. (författare)
-
- Hallén, Anders. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
visa fler...
-
Svensson, B. G. (författare)
-
Larsen, A. N. (författare)
-
visa färre...
-
(creator_code:org_t)
- 2000
- 2000
- Engelska.
-
Ingår i: Materials Science in Semiconductor Processing. - 1369-8001 .- 1873-4081. ; 3:4, s. 279-283
- Relaterad länk:
-
https://urn.kb.se/re...
-
visa fler...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- Boron delta layers in silicon, grown by molecular beam epitaxy and characterized by the secondary ion mass spectrometry, have been employed to investigate the migration of silicon self-interstitials during irradiation with MeV protons in the 500-850 degreesC temperature range. After growth, the samples were thinned from the backside to a thickness that made them transparent for the proton energies used. As a result, the generation rate of point defects can be considered as essentially uniform throughout the samples. However: the evolution of the boron profiles is almost identical to that observed after injection of self-interstitials caused by thermal oxidation of the samples at elevated temperature. This strongly indicates that the surface acts as a reflective boundary for the migrating self-interstitials or/ and an efficient sink for mobile vacancies. Furthermore, higher value of interstitial supersaturation in the near-surface region in proton-irradiated samples is consistent with experimentally detected depth dependence for immobile fraction in boron clusters. Then, activation energy of boron mobilization, (0.9 +/- 0.4) eV, was attributed to the dissociation of boron clusters.
Nyckelord
- boron
- silicon
- proton irradiation
- enhanced diffusion
- clustering
- point-defects
- enhanced diffusion
- dopant diffusion
- si
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas