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Metallized and oxid...
Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors
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- Badel, Xavier (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Linnros, Jan (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Kleimann, P. (författare)
- LENAC, Univ.́ Claude Bernard Lyon-I, Villeurbanne
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- Norlin, Börje (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Koskiahde, E. (författare)
- Metorex International Oy, Espoo
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- Valpas, K. (författare)
- Metorex International Oy, Espoo
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- Nenonen, S. (författare)
- Metorex International Oy, Espoo
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- Petersson, Sture (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT,Department of Microelectronics, Roy. Inst. of Technology of Sweden, Kista
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- Fröjdh, Christer (författare)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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(creator_code:org_t)
- IEEE, 2004
- 2004
- Engelska.
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Ingår i: IEEE Transactions on Nuclear Science. - : IEEE. - 0018-9499 .- 1558-1578. ; 51:3, s. 1001-1005, s. 1006-1010
- Relaterad länk:
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http://ieeexplore.ie...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Silicon charge-coupled devices (CCDs) covered with a scintillating film are now available on the market for use in digital medical imaging. However, these devices could still be improved in terms of sensitivity and especially spatial resolution by coating the CCD with an array of scintillating waveguides. In this paper, such waveguides were fabricated by first etching pores in silicon, then performing metallization or oxidation of the pore walls and finally filling the pores with CsI(TI). The resulting structures were observed using scanning electron microscopy and tested under X-ray exposure. Theoretical efficiencies of macropore arrays filled with CsI(TI) were also calculated, indicating that the optimal pore depth for metallized macropore arrays is about 80 mum while it is around 350 mum for oxidized ones. This result, together with the roughness of the metal coating, explains why lower SNR values were measured with the metallized macropores. Indeed, the macropore arrays had depths in the range of 210-390 mum, which is favorable to oxidized structures.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- CsI(TI)
- Pixellated detectors
- Scintillating wave-guides
- X-ray imaging
- Cesium compounds
- Imaging techniques
- Metallizing
- Optical resolving power
- Optical waveguides
- Phosphors
- Scanning electron microscopy
- Signal to noise ratio
- Silicon
- X rays
- CsI(Tl)
- Pixellated detectors
- Scintillating waveguides
- X-ray imaging
- Charge coupled devices
- Electrophysics
- Elektrofysik
- Electrical engineering, electronics and photonics
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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