Sökning: onr:"swepub:oai:DiVA.org:kth-5982" > Nano-fabrication of...
Fältnamn | Indikatorer | Metadata |
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000 | 02109naa a2200337 4500 | |
001 | oai:DiVA.org:kth-5982 | |
003 | SwePub | |
008 | 060608s2004 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-59822 URI |
024 | 7 | a https://doi.org/10.1016/j.mee.2004.03.0062 DOI |
040 | a (SwePub)kth | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a ref2 swepub-contenttype |
072 | 7 | a art2 swepub-publicationtype |
100 | 1 | a Holmberg, Andersu KTH,Fysik4 aut0 (Swepub:kth)u1qav7db |
245 | 1 0 | a Nano-fabrication of condenser and micro zone plates for compact X-ray microscopy |
264 | 1 | c 2004 |
338 | a print2 rdacarrier | |
500 | a QC 20100616, QC 20111017. 29th International Conference on Micro and Nano Engineering (MNE 2003), Cambridge, ENGLAND, SEP 22-25, 2003 | |
520 | a We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The process is developed on solely commercially available resists and instruments. As examples, we demonstrate fabrication of micro-zone plates with outermost linewidths of 30 nm and an uniform zone height of 160 nm, and a 4.5 mm diameter condenser zone plate with 50-60 nm lines, fabricated by using stitched fields. | |
650 | 7 | a NATURVETENSKAPx Fysik0 (SwePub)1032 hsv//swe |
650 | 7 | a NATURAL SCIENCESx Physical Sciences0 (SwePub)1032 hsv//eng |
653 | a Physics | |
653 | a Fysik | |
700 | 1 | a Rehbein, Stefanu KTH,Fysik4 aut0 (Swepub:kth)u1lmm9pi |
700 | 1 | a Hertz, Hans M.u KTH,Fysik4 aut0 (Swepub:kth)u10uiefj |
710 | 2 | a KTHb Fysik4 org |
773 | 0 | t Microelectronic Engineeringg 73/74, s. 639-643q 73/74<639-643x 0167-9317x 1873-5568 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-5982 |
856 | 4 8 | u https://doi.org/10.1016/j.mee.2004.03.006 |
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