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SCATTERED-LIGHT INV...
SCATTERED-LIGHT INVESTIGATION DURING LCVD OF W FROM WF6/H-2/AR GAS-MIXTURE
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- HESZLER, P (författare)
- Uppsala universitet
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- CARLSSON, JO (författare)
- Uppsala universitet
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(creator_code:org_t)
- PERGAMON-ELSEVIER SCIENCE LTD, 1995
- Engelska 955-958 s.
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Ingår i: VACUUM. - : PERGAMON-ELSEVIER SCIENCE LTD. ; 46:8-10
- Relaterad länk:
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https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- The intensity of the scattered ArF excimer laser line was measured during photolytic, laser assisted chemical vapour deposition of tungsten from WF6/H-2/Ar gas mixtures of different compositions. The scattering was due to nm size tungsten clusters. The s
Nyckelord
- CHEMICAL-VAPOR-DEPOSITION; LASER; TUNGSTEN; SPECTROSCOPY; WF6; CVD
Publikations- och innehållstyp
- vet (ämneskategori)
- ovr (ämneskategori)