MULTI-POSITION LARGE TUNING-RANGE DIGITALLY TUNEABLE CAPACITORS EMBEDDED IN 3D MICROMACHINED TRANSMISSION LINES

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Shah, UmerKTH,Mikrosystemteknik,RF MEMS (författare)

MULTI-POSITION LARGE TUNING-RANGE DIGITALLY TUNEABLE CAPACITORS EMBEDDED IN 3D MICROMACHINED TRANSMISSION LINES

Artikel/kapitelEngelska2011

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IEEE,2011
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LIBRIS-ID:oai:DiVA.org:kth-47442
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-47442URI
https://doi.org/10.1109/MEMSYS.2011.5734387DOI

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Språk:engelska
Sammanfattning på:engelska

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© 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
This paper reports for the first time on multi-position RF MEMS digitally tuneable capacitors with large tuning range which are integrated inside a coplanar transmission line and whose tuning is achieved by moving the sidewalls of the 3D micromachined transmission line, with the actuators being completely embedded and shielded inside the ground layer. Devices with symmetrical two and three stage actuators have been fabricated in an SOI RF MEMS process. A tuning range of Cmax/Cmin=2.41 with a total of 7 discrete tuning steps from 44 to 106 fF was achieved for the three-stage tuneable capacitors. The symmetrical integration in the transmission line and a low parasitic inductance result in a high resonance frequency of 77 GHz. Devices with actuator designs of different mechanical stiffness, resulting in actuation voltages of 16 to 73 V, were fabricated and evaluated. The robustness of the actuator to high-power signals has been investigated by a nonlinear electromechanical model, which shows that self actuation occurs for high-stiffness designs (73 N/m) not below 50 dBm, and even very low-stiffness devices (9.5 N/m) do not self-actuate below 40 dBm.

Ämnesord och genrebeteckningar

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
RF MEMS
tuneable capacitors
3D transmission line

Biuppslag (personer, institutioner, konferenser, titlar ...)

Sterner, MikaelKTH,Mikrosystemteknik,RF MEMS(Swepub:kth)u1ylclf0 (författare)
Stemme, GöranKTH,Mikrosystemteknik(Swepub:kth)u1oyebfq (författare)
Oberhammer, JoachimKTH,Mikrosystemteknik,RF MEMS(Swepub:kth)u12600dy (författare)
KTHMikrosystemteknik (creator_code:org_t)

Sammanhörande titlar

Ingår i:IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011: IEEE, s. 165-1689781424496327

Internetlänk

http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5734387Published version
https://kth.diva-portal.org/smash/get/diva2:455329/ATTACHMENT01.pdfattachment:postprint
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-47442
https://doi.org/10.1109/MEMSYS.2011.5734387

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Av författaren/redakt...: Shah, Umer; Sterner, Mikael; Stemme, Göran; Oberhammer, Joac ...

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