Spectral evidence of spinodal decomposition, phase transformation and molecular nitrogen formation in supersaturated TiAlN films upon annealing

• Thermal treatment of supersaturated Ti(1-x)Al(x)N films (x approximate to 0.67) with a dominant ternary cubic-phase were performed in the 700-1000 degrees C range. Grazing incidence X-ray diffraction (GIXRD) shows that, for annealing temperatures up to 800 degrees C, the film structure undergoes the formation of coherent cubic AlN (c-AlN) and TiN (c-TiN) nanocrystallites via spinodal decomposition and, at higher temperatures (>= 900 degrees C), GIXRD shows that the c-AlN phase transforms into the thermodynamically more stable hexagonal AIN (h-AlN). X-ray absorption near-edge structure (XANES) at the Ti K-edge is consistent with spinodal decomposition taking place at 800 degrees C, while Al K-edge and N K-edge XANES and X-ray emission data show the nucleation of the h-AlN phase at temperatures >800 degrees C, in agreement with the two-step decomposition process for rock-salt structured TiAlN, which was also supported by X-ray diffraction patterns and first-principle calculations. Further, the resonant inelastic X-ray scattering technique near the N K-edge revealed that N(2) is formed as a consequence of the phase transformation process.

Ämnesord

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Nyckelord

TiAlN

Nanocrystalline materials

X-ray absorption near-edge structure

Resonant inelastic X-ray scattering

TECHNOLOGY

TEKNIKVETENSKAP

Engineering Science with specialization in Electronics

Teknisk fysik med inriktning mot elektronik

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