Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels

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Fältnamn	Indikatorer	Metadata
000		02984naa a2200373 4500
001		oai:DiVA.org:kth-20576
003		SwePub
008		100810s2001 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-205762 URI
024	7	a https://doi.org/10.1016/S0925-4005(00)00675-42 DOI
040		a (SwePub)kth
041		a engb eng
042		9 SwePub
072	7	a ref2 swepub-contenttype
072	7	a art2 swepub-publicationtype
100	1	a Andersson, Heleneu KTH,Bioteknologi4 aut0 (Swepub:kth)u1706qv6
245	1 0	a Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels
264	1	c 2001
338		a print2 rdacarrier
500		a QC 20100525
520		a The suitability of using octafluorocyclobutane (C4F8) patches as hydrophobic valves in microfluidic biochemical applications has been shown. A technique has been developed to generate lithographically defined C4F8 hydrophobic patches in deep reactive ion-etched silicon channels. Some of the advantages of this process are that no specific cleaning of the substrate is required, C4F8 is deposited on the sidewalls and the bottom of the channels, a standard photoresist mask can be used to define the patches, and that it is a fast and convenient dry chemical process performed by a standard inductively coupled plasma etcher using the Bosch process. Different patch lengths (200-1000 mum) of C4F8 were deposited in 50 mum wide channels to evaluate which size is most suitable for microfluidic biochemical applications. The valve function of the hydrophobic patches was tested for the following liquids: DD water, acetone, propanol, bead solution and a mixture used for pyrosequencing of DNA. Patch lengths of 200 mum of C4F8 successfully stopped each solution for at least 20 consecutive times. The C4F8 film resists water for at least 5 h. The hydrophobic valve also resists very high concentrations (25%) of surfactants (Tween 80). C4F8 shows a much higher resistance towards water and surface active solutions than previous hydrophobic patches. However, 50% Tween 80 was not stopped at all by the hydrophobic patch. An applied pressure of 760 Pa at the inlet was needed for water to over-run the hydrophobic patch.
653		a passive valve
653		a liquid control
653		a fluorocarbon
653		a capillary tilling
653		a microfluidics
700	1	a van der Wijngaart, Wouteru KTH,Signaler, sensorer och system4 aut0 (Swepub:kth)u1wdbont
700	1	a Griss, P.4 aut
700	1	a Niklaus, Franku KTH,Signaler, sensorer och system4 aut0 (Swepub:kth)u1bcu8r2
700	1	a Stemme, Göranu KTH,Signaler, sensorer och system4 aut0 (Swepub:kth)u1oyebfq
710	2	a KTHb Bioteknologi4 org
773	0	t Sensors and actuators. B, Chemicalg 75:1-2, s. 136-141q 75:1-2<136-141x 0925-4005x 1873-3077
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-20576
856	4 8	u https://doi.org/10.1016/S0925-4005(00)00675-4

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Av författaren/redakt...: Andersson, Helen ...; van der Wijngaar ...; Griss, P.; Niklaus, Frank; Stemme, Göran

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Av lärosätet: Kungliga Tekniska Högskolan

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