SwePub
Sök i LIBRIS databas

  Extended search

WFRF:(Schmidt Jens)
 

Search: WFRF:(Schmidt Jens) > (2015-2019) > Trimethylboron as s...

Trimethylboron as single-source precursor for boron-carbonthin film synthesis by plasma chemical vapor deposition

Imam, Mewlude (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallat Source ESS AB, Sweden
Höglund, Carina (author)
Linköpings universitet,Tekniska fakulteten,Tunnfilmsfysik,European Spallation Source ERIC, Lund, Sweden
Jensen, Jens (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
show more...
Schmidt, Susann (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallation Source ERIC, Lund, Sweden
Ivanov, Ivan Gueorguiev (author)
Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
Hall-Wilton, Richard (author)
European Spallation Source ERIC, Lund, Sweden
Birch, Jens (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
Pedersen, Henrik (author)
Linköpings universitet,Kemi,Tekniska fakulteten
show less...
 (creator_code:org_t)
2015
English.
Related links:
https://urn.kb.se/re...
  • Other publication (other academic/artistic)
Abstract Subject headings
Close  
  • Boron-carbon (BxC) thin films are potential neutron converting layers for 10B-based neutron detectors. However, as common material choices for such detectors do not tolerate temperature above 500°C, a low temperature deposition route is required for this application. Here we study trimethylboron B(CH3)3 (TMB) as a single-source precursor for the deposition of BxC thin films by plasma CVD using Ar plasma. The effect of plasma power, TMB/Ar ratio and total pressure on the film composition, morphology and structure are investigated. The highest B/C ratio of 1.9 was achieved at high TMB flow in a low total pressure and high plasma power which rendered an approximate substrate temperature of ~ 300 °C. X-ray photoelectron spectroscopy shows that B-C bonds prevail in the films, although C-C and B-O bonds are also present. Raman spectroscopy confirms the presence of amorphous carbon phases in the films. The H content in the films is found to be 15±5 at. % by the time of flight elastic recoil detection analysis (Tof-ERDA). The film density as determined from X-ray reflectivity (XRR) measurements is 2. 16 ± 0.01  g/cm3 and the internal compressive stresses are measured to be less than 400 MPa.

Subject headings

NATURVETENSKAP  -- Fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences (hsv//eng)
NATURVETENSKAP  -- Kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences (hsv//eng)

Publication and Content Type

vet (subject category)
ovr (subject category)

To the university's database

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

 
pil uppåt Close

Copy and save the link in order to return to this view