Aerotaxy: High throughput gas-phase epitaxy of nanostructures

Deppert, Knut (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH

Sivakumar, Sudhakar (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH

Persson, Axel (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Centrum för analys och syntes,Kemiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Centre for Analysis and Synthesis,Department of Chemistry,Departments at LTH,Faculty of Engineering, LTH

Wallenberg, Reine (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Centrum för analys och syntes,Kemiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Centre for Analysis and Synthesis,Department of Chemistry,Departments at LTH,Faculty of Engineering, LTH

Samuelson, Lars (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH

Johansson, Jonas (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH

Magnusson, Martin H. (author): Lund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Teknisk fysik (CI),Utbildningsprogram, LTH,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Engineering Physics (M.Sc.Eng.),Educational programmes, LTH,Faculty of Engineering, LTH,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH

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Abstract Subject headings

Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.

By the author/editor: Deppert, Knut; Sivakumar, Sudha ...; Persson, Axel; Metaferia, Wondw ...; Wallenberg, Rein ...; Heurlin, Magnus; show more...; Samuelson, Lars; Johansson, Jonas; Magnusson, Marti ...; show less...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Nano technology; and Nano technology

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Other Physics To ...

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