(WAKA:ovr) pers:(Hultman Lars)
Search: (WAKA:ovr) pers:(Hultman Lars) > Structural, electri...
- 4 of 46
- Previous record
- Next record
- To hitlist
Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering
-
- Broitman, E. (author)
- College of William and Mary, Williamsburg, Virginia
-
- Lindquist, O.P.A. (author)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
-
- Hellgren, N. (author)
- University of Illinois, Urbana
- show more...
- show less...
- (creator_code:org_t)
- American Vacuum Society, 2003
- English.
- In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559.
- Other publication (other academic/artistic)
Abstract
Subject headings
Close
- The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (Eion) and ion-to-carbon flux (Jion/JC). The results show that, in the ranges of 5 eV⩽Eion⩽85 eV and 1.1⩽Jion/JC⩽6.8, the presence of defective graphite formed by subplanted C and Ar atoms, voids, and the surface roughness, are the dominant influences on the resistivity and optical absorption
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- vet (subject category)
- ovr (subject category)
Find in a library
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (Search the publication in LIBRIS)
To the university's database
- 4 of 46
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Broitman, E.
- Lindquist, O.P.A ...
- Hellgren, N.
- Hultman, Lars
- Holloway, B.C.
- Articles in the publication
- Journal of Vacuu ...
- By the university
- Linköping University
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
