Sökning: (WAKA:ovr) pers:(Hultman Lars) > Structural, electri...
Fältnamn | Indikatorer | Metadata |
---|---|---|
000 | 02102nam a2200337 4500 | |
001 | oai:DiVA.org:liu-46454 | |
003 | SwePub | |
008 | 091011s2003 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-464542 URI |
024 | 7 | a https://doi.org/10.1116/1.16172772 DOI |
040 | a (SwePub)liu | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a vet2 swepub-contenttype |
072 | 7 | a ovr2 swepub-publicationtype |
100 | 1 | a Broitman, E.u College of William and Mary, Williamsburg, Virginia4 aut |
245 | 1 0 | a Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering |
264 | 1 | b American Vacuum Society,c 2003 |
338 | a print2 rdacarrier | |
500 | a Letters | |
520 | a The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (Eion) and ion-to-carbon flux (Jion/JC). The results show that, in the ranges of 5 eV⩽Eion⩽85 eV and 1.1⩽Jion/JC⩽6.8, the presence of defective graphite formed by subplanted C and Ar atoms, voids, and the surface roughness, are the dominant influences on the resistivity and optical absorption | |
653 | a TECHNOLOGY | |
653 | a TEKNIKVETENSKAP | |
700 | 1 | a Lindquist, O.P.A.u Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan4 aut |
700 | 1 | a Hellgren, N.u University of Illinois, Urbana4 aut |
700 | 1 | a Hultman, Larsu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)larhu75 |
700 | 1 | a Holloway, B.C.u College of William and Mary, Williamsburg, Virginia4 aut |
710 | 2 | a College of William and Mary, Williamsburg, Virginiab Institutionen för fysik, kemi och biologi4 org |
773 | 0 | t Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Filmsd : American Vacuum Societyx 0734-2101x 1520-8559 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-46454 |
856 | 4 8 | u https://doi.org/10.1116/1.1617277 |
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