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High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
- Brizuela, F. (author)
- Brewer, C. (author)
- Fernandez, S. (author)
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- Marconi, M. (author)
- Chao, W. (author)
- Anderson, E. H. (author)
- Vinogradov, A. V. (author)
- Artyukov, I. A. (author)
- Ponomareko, A. G. (author)
- Kondratenko, V. V. (author)
- Attwood, D. T. (author)
- Bertness, K. A. (author)
- Sanford, N. A. (author)
- Rocca, J. J. (author)
- Menonil, C. S. (author)
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- (creator_code:org_t)
- 2009-09-25
- 2009
- English.
- In: 9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY. - : IOP Publishing.
- Conference paper (peer-reviewed)
Abstract
Subject headings
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- Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of table-top zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies (hsv//eng)
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- ref (subject category)
- kon (subject category)
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- Brizuela, F.
- Brewer, C.
- Fernandez, S.
- Martz, Dale
- Marconi, M.
- Chao, W.
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- Anderson, E. H.
- Vinogradov, A. V ...
- Artyukov, I. A.
- Ponomareko, A. G ...
- Kondratenko, V. ...
- Attwood, D. T.
- Bertness, K. A.
- Sanford, N. A.
- Rocca, J. J.
- Menonil, C. S.
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- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
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- 9TH INTERNATIONA ...
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- Royal Institute of Technology
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