Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

Electronics

Elektronik

Publication and Content Type

ref (subject category)

kon (subject category)