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Unveiling the compl...
Unveiling the complex electronic structure of amorphous metal oxides
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- Århammar, Cecilia (author)
- KTH,Uppsala universitet,Materialteori,Tillämpad materialfysik
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- Pietzsch, Annette (author)
- Lund University,Lunds universitet,MAX IV-laboratoriet,MAX IV Laboratory,MAX-lab, Lunds universitet, Lund
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- Bock, Nicolas (author)
- Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM, USA
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- Holmström, Erik (author)
- Instituto di Fisica, Universidad Austral de Chile, Valdivia, Chile
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- Araujo, Carlos Moyses (author)
- Uppsala universitet,Materialteori
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- Gråsjö, Johan (author)
- Uppsala universitet,Institutionen för farmaci,Fasta tillståndets fysik
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- Zhao, Shuxi (author)
- Uppsala universitet,Fasta tillståndets fysik
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- Green, Sara (author)
- Uppsala universitet,Fasta tillståndets fysik
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- Peery, T (author)
- Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM, USA
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- Hennies, Franz (author)
- Lund University,Lunds universitet,Uppsala universitet,Mjukröntgenfysik,MAX IV-laboratoriet,MAX IV Laboratory
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- Amerioun, Shahrad (author)
- Sandvik Tooling, R and D, Stockholm
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- Foehlisch, Alexander (author)
- Insitute for Methods and Instrumentation in Synchrotron Radiation Research G-12, Helmhotz-Zentrum Berlin für Materialien und Energie, Berlin, Tyskland
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- Schlappa, Justine (author)
- Uppsala universitet,Fasta tillståndets fysik
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- Schmitt, Thorsten (author)
- Swiss Light Source, Paul Scherrer Institut, Villigen, Schweiz
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- Strocov, Vladimir N (author)
- Swiss Light Source, Paul Scherrer Institut, Villigen, Schweiz
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- Niklasson, Gunnar A (author)
- Uppsala universitet,Fasta tillståndets fysik
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- Wallace, Duane C (author)
- Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM, USA
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- Rubensson, Jan-Erik (author)
- Uppsala universitet,Mjukröntgenfysik
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- Johansson, Börje (author)
- KTH,Uppsala universitet,Materialteori,Tillämpad materialfysik
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- Ahuja, Rajeev (author)
- KTH,Uppsala universitet,Materialteori,Tillämpad materialfysik
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(creator_code:org_t)
- 2011-04
- 2011
- English.
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In: Proceedings of the National Academy of Sciences of the United States of America. - : Proceedings of the National Academy of Sciences. - 0027-8424 .- 1091-6490. ; 108:16, s. 6355-6360
- Related links:
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http://www.pnas.org/...
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http://dx.doi.org/10...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://lup.lub.lu.s...
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https://urn.kb.se/re...
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Abstract
Subject headings
Close
- Amorphous materials represent a large and important emerging area of material's science. Amorphous oxides are key technological oxides in applications such as a gate dielectric in Complementary metal-oxide semiconductor devices and in Silicon-Oxide-Nitride-Oxide-Silicon and TANOS (TaN-Al2O3-Si3N4-SiO2-Silicon) flash memories. These technologies are required for the high packing density of today's integrated circuits. Therefore the investigation of defect states in these structures is crucial. In this work we present X-ray synchrotron measurements, with an energy resolution which is about 5-10 times higher than is attainable with standard spectrometers, of amorphous alumina. We demonstrate that our experimental results are in agreement with calculated spectra of amorphous alumina which we have generated by stochastic quenching. This first principles method, which we have recently developed, is found to be superior to molecular dynamics in simulating the rapid gas to solid transition that takes place as this material is deposited for thin film applications. We detect and analyze in detail states in the band gap that originate from oxygen pairs. Similar states were previously found in amorphous alumina by other spectroscopic methods and were assigned to oxygen vacancies claimed to act mutually as electron and hole traps. The oxygen pairs which we probe in this work act as hole traps only and will influence the information retention in electronic devices. In amorphous silica oxygen pairs have already been found, thus they may be a feature which is characteristic also of other amorphous metal oxides.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- stochastic quench
- X-ray absorption spectroscopy
- ab initio
- coating
- Physics
- Fysik
- Engineering Science with specialization in Solid State Physics
- Teknisk fysik med inriktning mot fasta tillståndets fysik
- stochastic quench
- X-ray absorption spectroscopy
- ab initio
- coating
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Århammar, Cecili ...
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Pietzsch, Annett ...
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Bock, Nicolas
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Holmström, Erik
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Araujo, Carlos M ...
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Gråsjö, Johan
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show more...
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Zhao, Shuxi
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Green, Sara
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Peery, T
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Hennies, Franz
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Amerioun, Shahra ...
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Foehlisch, Alexa ...
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Schlappa, Justin ...
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Schmitt, Thorste ...
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Strocov, Vladimi ...
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Niklasson, Gunna ...
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Wallace, Duane C
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Rubensson, Jan-E ...
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Johansson, Börje
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Ahuja, Rajeev
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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Proceedings of t ...
- By the university
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Uppsala University
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Lund University
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Royal Institute of Technology