WFRF:(Larsson Torbjörn)
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Reactive sputtering applied to microelectronic devices
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- Larsson, Torbjörn (author)
- Uppsala universitet,Teknisk-naturvetenskapliga vetenskapsområdet
- (creator_code:org_t)
- ISBN 9155422160
- Uppsala : Acta Universitatis Upsaliensis, 1988
- English 20 s.
- Series: Comprehensive summaries of Uppsala dissertations from the Faculty of Science, 0282-7468 ; 143
- Doctoral thesis (other academic/artistic)
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- NATURAL SCIENCES
- NATURVETENSKAP
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- vet (subject category)
- dok (subject category)
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