Sökning: WFRF:(Fager Hanna) > Growth and properti...
Fältnamn | Indikatorer | Metadata |
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000 | 02992naa a2200349 4500 | |
001 | oai:DiVA.org:liu-106574 | |
003 | SwePub | |
008 | 140512s2014 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-1065742 URI |
024 | 7 | a https://doi.org/10.1016/j.surfcoat.2014.10.0532 DOI |
040 | a (SwePub)liu | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a ref2 swepub-contenttype |
072 | 7 | a art2 swepub-publicationtype |
100 | 1 | a Fager, Hannau Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)hanfa36 |
245 | 1 0 | a Growth and properties of amorphous Ti-B-Si-N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets |
264 | 1 | b Elsevier,c 2014 |
338 | a electronic2 rdacarrier | |
520 | a Amorphous nitrides are explored for their homogenous structure and potential use as wear-resistant coatings, beyond their much studied nano-and microcrystalline counterparts. (TiB2)1−xSixNy thin films were deposited on Si(001) substrates by a hybrid technique of high power impulse magnetron sputtering (HIPIMS) combined with dc magnetron sputtering (DCMS) using TiB2 and Si targets in a N2/Ar atmosphere. By varying the sputtering dc power to the Si target from 200 to 2000 W while keeping the average power to the TiB2-target, operated in HIPIMS mode, constant at 4000 W, the Si content in the films increased gradually from x=0.01 to x=0.43. The influence of the Si content on the microstructure, phase constituents, and mechanical properties were systematically investigated. The results show that the microstructure of as-deposited (TiB2)1−xSixNy films changes from nanocrystalline with 2-4 nm TiN grains for x=0.01 to fully electron diffraction amorphous for x=0.22. With increasing Si content, the hardness of the films increases from 8.5 GPa with x=0.01 to 17.2 GPa with x=0.43. | |
650 | 7 | a NATURVETENSKAPx Fysik0 (SwePub)1032 hsv//swe |
650 | 7 | a NATURAL SCIENCESx Physical Sciences0 (SwePub)1032 hsv//eng |
700 | 1 | a Greczynski, Grzegorzu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)grzgr49 |
700 | 1 | a Jensen, Jensu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)jenje80 |
700 | 1 | a Lu, Junu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)junlu07 |
700 | 1 | a Hultman, Larsu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)larhu75 |
710 | 2 | a Linköpings universitetb Tunnfilmsfysik4 org |
773 | 0 | t Surface & Coatings Technologyd : Elsevierg 259, s. 442-447q 259<442-447x 0257-8972x 1879-3347 |
856 | 4 | u https://liu.diva-portal.org/smash/get/diva2:716728/FULLTEXT01.pdfx primaryx Raw objecty fulltext:postprint |
856 | 4 | u http://liu.diva-portal.org/smash/get/diva2:716728/FULLTEXT01 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-106574 |
856 | 4 8 | u https://doi.org/10.1016/j.surfcoat.2014.10.053 |
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