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Single Domain 3C-Si...
Single Domain 3C-SiC Growth on Off-Oriented 4H-SiC Substrates
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- Jokubavicius, Valdas (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Yazdi, Gholam Reza (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Liljedahl, Rickard (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Ivanov, Ivan Gueorguiev (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Sun, Jianwu (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Liu, Xinyu (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Philipp, Schuh (author)
- University of Erlangen, Erlangen, Germany
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- Wilhelm, Martin (author)
- University of Erlangen, Erlangen, Germany
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- Wellmann, Peter (author)
- University of Erlangen, Erlangen, Germany
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- Yakimova, Rositsa (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Syväjärvi, Mikael (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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(creator_code:org_t)
- 2015-05-20
- 2015
- English.
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In: Crystal Growth & Design. - : American Chemical Society (ACS). - 1528-7483 .- 1528-7505. ; 15:6, s. 2940-2947
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Abstract
Subject headings
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- We investigated the formation of structural defects in thick (∼1 mm) cubic silicon carbide (3C-SiC) layers grown on off-oriented 4H-SiC substrates via a lateral enlargement mechanism using different growth conditions. A two-step growth process based on this technique was developed, which provides a trade-off between the growth rate and the number of defects in the 3C-SiC layers. Moreover, we demonstrated that the two-step growth process combined with a geometrically controlled lateral enlargement mechanism allows the formation of a single 3C-SiC domain which enlarges and completely covers the substrate surface. High crystalline quality of the grown 3C-SiC layers is confirmed using high resolution X-ray diffraction and low temperature photoluminescence measurements.
Subject headings
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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Jokubavicius, Va ...
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Yazdi, Gholam Re ...
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Liljedahl, Ricka ...
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Ivanov, Ivan Gue ...
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Sun, Jianwu
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Liu, Xinyu
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Philipp, Schuh
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Wilhelm, Martin
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Wellmann, Peter
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Yakimova, Rosits ...
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Syväjärvi, Mikae ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Materials Chemis ...
- Articles in the publication
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Crystal Growth & ...
- By the university
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Linköping University