(WAKA:ovr) pers:(Hultman Lars)
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LIBRIS Formathandbok (Information om MARC21)
| Fältnamn | Indikatorer | Metadata |
|---|---|---|
| 000 | 02699nam a2200313 4500 | |
| 001 | oai:DiVA.org:liu-86256 | |
| 003 | SwePub | |
| 008 | 121212s2012 | |||||||||||000 ||eng| | |
| 024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-862562 URI |
| 040 | a (SwePub)liu | |
| 041 | a engb eng | |
| 042 | 9 SwePub | |
| 072 | 7 | a vet2 swepub-contenttype |
| 072 | 7 | a ovr2 swepub-publicationtype |
| 100 | 1 | a Eriksson, Andersu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)ander31 |
| 245 | 1 0 | a Nanocolumnar Epitaxial Ti1-xSixN (0 ≤ x ≤ 0.18) Thin Films Grown by Dual Reactive Magnetron Sputtering on MgO (001), (011), and (111) Substrates |
| 264 | 1 | c 2012 |
| 338 | a print2 rdacarrier | |
| 520 | a Ti1-xSixNy thin films and multilayers have been grown on single-crystal TiN-templated MgO (001), (011), and (111) substrates kept at 550 °C. Elemental Ti and Si targets were used in UVH reactive dual magnetron sputtering in a mixed Ar/N2 discharge. Composition analysis by time-of-flight energy elastic recoil detection analysis show that the films are close to stoichiometric (0.95 ≤ y ≤ 1.00) with respect to TiN over the wide range of Si concentrations 0 ≤ x ≤ 0.22. High-resolution transmission electron microscopy (TEM) combined with scanning TEM and energy dispersive Xray analysis show that all films grow epitaxially for x ≤ 0.18 and that as much as every fifth Ti atom can be replaced by Si (~10 at.%) in Ti1-xSixN(001). For the (011) and (111)-oriented films, however, only 1-2 at.% Si substitutes for Ti. Instead, Si segregates to form crystalline-to-amorphous SiNz (z ≈ 1) tissue phases, which promote the formation of epitaxial TiN nanocolumns. The nanocolumns have preferred {110} interfaces and {200} top facets and grow several hundreds of nm in length. | |
| 653 | a NATURAL SCIENCES | |
| 653 | a NATURVETENSKAP | |
| 700 | 1 | a Lu, Junu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)junlu07 |
| 700 | 1 | a Tengstrand, Olofu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)olote71 |
| 700 | 1 | a Jensen, Jensu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)jenje80 |
| 700 | 1 | a Eklund, Peru Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)perek02 |
| 700 | 1 | a Rosén, Johannau Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)johro07 |
| 700 | 1 | a Hultman, Larsu Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan4 aut0 (Swepub:liu)larhu75 |
| 710 | 2 | a Linköpings universitetb Tunnfilmsfysik4 org |
| 856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-86256 |
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- Eriksson, Anders
- Lu, Jun
- Tengstrand, Olof
- Jensen, Jens
- Eklund, Per
- Rosén, Johanna
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- Hultman, Lars
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