WFRF:(Fan Jie)
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Transfer-free, lithography-free, and micrometer-precision patterning of CVD graphene on SiO 2 toward all-carbon electronics
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- Dong, Y. B. (author)
- Beijing University of Technology
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- Xie, Yiyang (author)
- Beijing University of Technology
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- Xu, C. (author)
- Beijing University of Technology
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- (creator_code:org_t)
- AIP Publishing, 2018
- 2018
- English.
- In: APL Materials. - : AIP Publishing. - 2166-532X. ; 6:2
- Journal article (peer-reviewed)
Abstract
Subject headings
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- A method of producing large area continuous graphene directly on SiO 2 by chemical vapor deposition is systematically developed. Cu thin film catalysts are sputtered onto the SiO 2 and pre-patterned. During graphene deposition, high temperature induces evaporation and balling of the Cu, and the graphene "lands onto" SiO 2 . Due to the high heating and growth rate, continuous graphene is largely completed before the Cu evaporation and balling. 60 nm is identified as the optimal thickness of the Cu for a successful graphene growth and μm-large feature size in the graphene. An all-carbon device is demonstrated based on this technique.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
- Dong, Y. B.
- Xie, Yiyang
- Xu, C.
- Li, X. J.
- Deng, Jun
- Fan, X.
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- Pan, G. Z.
- Wang, Qiuhua
- Xiong, Fangzhu
- Fu, Yafei
- Sun, Jie, 1977
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- About the subject
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- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Materials Engine ...
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- NATURAL SCIENCES
- NATURAL SCIENCES
- and Physical Science ...
- and Condensed Matter ...
- Articles in the publication
- APL Materials
- By the university
- Chalmers University of Technology
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