L773:0963 0252 OR L773:1361 6595
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A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code
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- Gudmundsson, Jon Tomas, 1965- (author)
- Shanghai Jiao Tong Universiy; University of Iceland; University of California
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- Kawamura, Emi (author)
- University of California at Berkeley
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- Lieberman, Michael A. (author)
- University of California at Berkeley
- (creator_code:org_t)
- 2013-05-20
- 2013
- English.
- In: Plasma sources science & technology. - : Institute of Physics Publishing (IOPP). - 0963-0252 .- 1361-6595. ; 22:3
- Journal article (peer-reviewed)
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Subject headings
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
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- ref (subject category)
- art (subject category)
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