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A photonic microsys...
A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
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- Mandon, J. (författare)
- Radboud Universiteit,Radboud University
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- Ayerden, N.P. (författare)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Ghaderi, Mohammadamir, 1986 (författare)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Harren, F. J. M. (författare)
- Radboud Universiteit,Radboud University
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- Wolffenbuttel, Reinoud F. (författare)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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(creator_code:org_t)
- 2017
- 2017
- Engelska.
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - 1084-6999. ; , s. 1052-1055
- Relaterad länk:
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https://research.cha...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
- NATURVETENSKAP -- Data- och informationsvetenskap -- Systemvetenskap, informationssystem och informatik (hsv//swe)
- NATURAL SCIENCES -- Computer and Information Sciences -- Information Systems (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Reglerteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Control Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publikations- och innehållstyp
- kon (ämneskategori)
- ref (ämneskategori)
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