WFRF:(Bengtsson Stefan 1961)
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Formation of silicon structures by plasma activated wafer bonding
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- Amirfeiz, Petra, 1973 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bergh, Mats, 1968 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- (creator_code:org_t)
- 2001
- 2001
- English.
- In: Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings. ; 99, s. 29-39
- Conference paper (peer-reviewed)
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- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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