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Nanoscale resolution microscopy and ablation with extreme ultraviolet lasers
- Menoni, C. S. (author)
- Brizuela, F. (author)
- Brewer, C. (author)
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- Bravo, H. (author)
- Langdon, B. (author)
- Vaschenko, G. (author)
- Luther, B. (author)
- Marconi, M. C. (author)
- Rocca, J. J. (author)
- Chao, W. (author)
- Anderson, E. H. (author)
- Attwood, D. T. (author)
- Vinogradov, A. V. (author)
- Artioukov, I. A. (author)
- Pershyn, Y. P. (author)
- Kondratenko, V. V. (author)
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- (creator_code:org_t)
- 2007
- 2007
- English.
- In: 2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2. - 9781424409242 ; , s. 488-489
- Conference paper (peer-reviewed)
Abstract
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- We obtain a spatial resolution down to 38 run with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies (hsv//eng)
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- ref (subject category)
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- 2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 (Search for host publication in LIBRIS)
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- Menoni, C. S.
- Brizuela, F.
- Brewer, C.
- Bravo, H.
- Langdon, B.
- Martz, Dale
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- Vaschenko, G.
- Luther, B.
- Marconi, M. C.
- Rocca, J. J.
- Chao, W.
- Anderson, E. H.
- Attwood, D. T.
- Vinogradov, A. V ...
- Artioukov, I. A.
- Pershyn, Y. P.
- Kondratenko, V. ...
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- ENGINEERING AND TECHNOLOGY
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- 2007 IEEE LEOS A ...
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- Royal Institute of Technology
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