Fabricating single silicon quantum rods for repeatable single dot photoluminescence measurements

• A fabrication method for a matrix pattern of laterally separated silicon quantum rods was developed, consisting of a three-step recipe utilizing electron beam lithography (EBL), reactive ion etching (RIE), and oxidation. Photoluminescence (PL) measurements -images, spectra, and blinking-verified that the presented method results in a high number of luminescing single silicon quantum rods in well defined positions on the sample. These are suitable for single dot spectroscopy and repeatable measurements, even using different measurement methods and instruments. [GRAPHICS] Colorized scanning electron microscope images of undulating silicon nanowalls for controlled single quantum rod fabrication.

Ämnesord

NATURVETENSKAP  -- Fysik -- Annan fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Other Physics Topics (hsv//eng)

Nyckelord

nanocrystal

quantum dot

quantum rod

silicon

single dot spectroscopy

Materials science

Teknisk materialvetenskap

Publikations- och innehållstyp

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