Investigation of exhausts from fabricated silicon micronozzles with rectangular and close to rotationally symmetric cross sections

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Fältnamn	Indikatorer	Metadata
000		02974naa a2200325 4500
001		oai:DiVA.org:uu-186774
003		SwePub
008		121129s2013 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1867742 URI
024	7	a https://doi.org/10.1088/0960-1317/23/10/1050012 DOI
040		a (SwePub)uu
041		a engb eng
042		9 SwePub
072	7	a ref2 swepub-contenttype
072	7	a art2 swepub-publicationtype
100	1	a Palmer, Kristofferu Uppsala universitet,Mikrosystemteknik,ÅSTC4 aut0 (Swepub:uu)kripa149
245	1 0	a Investigation of exhausts from fabricated silicon micronozzles with rectangular and close to rotationally symmetric cross sections
264		c 2013-08-28
264	1	b IOP Publishing,c 2013
338		a print2 rdacarrier
520		a Close to rotationally symmetric in-plane silicon micronozzles with throat and exit diameters of 45 and 260 µm, respectively, have been fabricated using semi-isotropic SF6 etching through an array mask utilizing microloading and reactive ion etching lag. Comparison with nozzles fabricated using deep reactive ion etching (DRIE) and having a rectangular cross-section but a similar hydraulic diameter in the throat, showed that the Reynolds numbers were almost equal even though the DRIE-etched nozzle had an almost five times larger cross-sectional area, hence implying less viscous losses and higher efficiency with the nearly symmetrical nozzles. The nozzle shapes have been studied using x-ray computed tomography. Comparison of the nozzles' exhaust jets using schlieren imaging, showed that the rectangular nozzles' jets deviate from the nozzle axis direction. It is believed that it is caused by the inclined side walls resulting from the DRIE etching. The results from intentionally misaligning the wafers, each containing half a nozzle, 50 µm parallel with or perpendicular to the nozzle axis, showed that the exhaust deviated and widened, respectively. The findings show that the nozzle symmetry affects both the shape and the pointing direction of the exhaust and that schlieren imaging is a powerful tool for determining nozzle thrust vector deviations.
653		a Teknisk fysik med inriktning mot mikrosystemteknik
653		a Engineering Science with specialization in Microsystems Technology
700	1	a Vargas Catalan, Ernestou Uppsala universitet,Mikrosystemteknik,ÅSTC4 aut0 (Swepub:uu)ernva826
700	1	a Lekholm, Villeu Uppsala universitet,Mikrosystemteknik,ÅSTC4 aut0 (Swepub:uu)ville816
700	1	a Thornell, Gregeru Uppsala universitet,Mikrosystemteknik,ÅSTC4 aut0 (Swepub:uu)gth12095
710	2	a Uppsala universitetb Mikrosystemteknik4 org
773	0	t Journal of Micromechanics and Microengineeringd : IOP Publishingg 23:10, s. 105001-q 23:10<105001-x 0960-1317x 1361-6439
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-186774
856	4 8	u https://doi.org/10.1088/0960-1317/23/10/105001

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Av författaren/redakt...: Palmer, Kristoff ...; Vargas Catalan, ...; Lekholm, Ville; Thornell, Greger

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Av lärosätet: Uppsala universitet

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