Electron dynamics in high power impulse magnetron sputtering discharges

• Electrons are the main energy carriers in HiPIMS discharges and their properties govern the ionization processes and thus the discharge properties. The properties of the electrons are described by the fundamental plasma parameters, such as the electron density, the effective electron temperature, the plasma potential, and the floating potential . Electrons are responsible for some of the most important inelastic collision processes taking place in the plasma volume, like ionization of working gas atoms and the atoms of the sputtered material, excitation of atoms to higher energetic levels, excitation of molecules to higher vibrational or rotational states, dissociation of molecules, occurring in particular in reactive sputtering processes, and creation of negative ions by attachment processes. In this chapter we give an extended overview of the measured fundamental plasma parameters related to electrons. The characterization methods applied, such as Langmuir probe, emissive probe, and triple probe, will be demonstrated as suitable methods for temporally and spatially resolved investigations. The analysis of the plasma characteristics reported in this chapter will help us identify desired discharge conditions and serves as important input to the discussion of the HiPIMS discharge physics given in Chapter 7.

Ämnesord

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Nyckelord

Electron density

Electron energy distribution function (eedf)

Electron temperature

Electrons

Plasma potential

Plasma probes

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