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Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides
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- Aiempanakit, M (author)
- Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet
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- Aijaz, A (author)
- Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet
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- Lundin, D (author)
- Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet
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- 2012
- 2012
- English.
- Conference paper (peer-reviewed)
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Keyword
- Engineering Science with specialization in Electronics
- Teknisk fysik med inriktning mot elektronik
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- By the author/editor
- Aiempanakit, M
- Aijaz, A
- Lundin, D
- Helmersson, U
- Kubart, Tomas
- By the university
- Uppsala University
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