In situ nanoindentation measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films up to 800 degrees C

• In this study, the in situ hardness and elastic modulus measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films are investigated using a high-temperature nanoindentation tester. It is found that the hardness of Cr0.49Al0.51N initially increases from 30.2 +/- 2.3GPa at room temperature (RT) and reaches a maximum of 33.2 +/- 2.4GPa at 600 degrees C before decreasing to 27.9 +/- 2.1GPa at 800 degrees C. However, the results for elastic modulus versus temperature follow a degraded trend, with 405 +/- 23GPa for RT, decreasing to 280 +/- 18GPa at 800 degrees C. Increases in the hardness and the elastic modulus can be achieved for both Al0.66Ti0.34N and Al0.65Ti0.33Y0.02N films as their temperatures increase. The addition of Y effectively promotes the hardness and the elastic modulus of Al0.66Ti0.34N at RT-300 degrees C. However, both hardness and elastic modulus change slightly as Y is incorporated at 300-800 degrees C.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Kemiteknik -- Polymerteknologi (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Chemical Engineering -- Polymer Technologies (hsv//eng)

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)