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Microstructure of α...
Microstructure of α-alumina thin films deposited at low temperatures on chromia template layers
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- Andersson, Jon M. (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Czigány, Zs. (författare)
- Research Institute for Technical Physics and Materials Science, Budapest, Hungary
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- Jin, P. (författare)
- National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan
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- Helmersson, Ulf (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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(creator_code:org_t)
- American Vacuum Society, 2004
- 2004
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 22:1, s. 117-121
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Radio frequency sputtering has been used to deposit -alumina (-Al2O3) thin films at substrate temperatures of 280–560 °C. The films are shown to be single phased and hard. Nanoindentation gives values of 306±31 and 27±3 GPa for elastic modulus and hardness, respectively, for a substrate temperature of 280 °C. Growth of the phase was achieved by in situ predeposition of a chromia template layer. Chromia crystallizes in the same hexagonal structure as -alumina, with a lattice mismatch of 4.1% in the a- and 4.6% in the c-parameter, and is shown to nucleate readily on the amorphous substrates (silicon with a natural oxide layer). This results in local epitaxy of -alumina on the chromia layer, as is shown by transmission electron microscopy. The alumina grains are columnar with grain widths increasing from 22±7 to 41±9 nm, as the temperature increases from 280 to 560 °C. This is consistent with a surface diffusion dominated growth mode and suggests that -alumina deposition at low temperatures is possible once initial grain nucleation has occurred. Results are also presented demonstrating chromia/-alumina growth on a technological substrate (Haynes230 Ni-based super alloy, Haynes International, Inc.).
Nyckelord
- alumina
- chromium compounds
- sputtered coatings
- indentation
- elastic moduli
- hardness
- sputter deposition
- transmission electron microscopy
- epitaxial layers
- grain size
- surface diffusion
- nucleation
- wear resistant coatings
- thermal barrier coatings
- NATURAL SCIENCES
- NATURVETENSKAP
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