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Influence of Si dop...
Influence of Si doping and O-2 flow on arc-deposited (Al,Cr)(2)O-3 coatings
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- Landälv, Ludvig, 1982- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Sandvik Coromant AB, Sweden
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- Gothelid, Emmanuelle (författare)
- Sandvik Coromant AB, Sweden
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- Jensen, Jens, 1968- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Greczynski, Grzegorz, 1973- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Lu, Jun, 1962- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Ahlgren, Mats (författare)
- Sandvik Coromant AB, Sweden
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- Hultman, Lars, Professor, 1960- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Alling, Björn, 1980- (författare)
- Linköpings universitet,Teoretisk Fysik,Tekniska fakulteten
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- Eklund, Per, Docent, 1977- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- A V S AMER INST PHYSICS, 2019
- 2019
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 37:6
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https://liu.diva-por... (primary) (Raw object)
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http://arxiv.org/pdf...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- (Al,Cr)(2)O-3 coatings with Al/( Al + Cr) = 0.5 or Al = 70 at. %, doped with 0, 5, or 10 at. % Si, were deposited on hard metal and Si(100) substrates to elucidate the influence of Si on the resulting coatings. The chemical analysis of the coatings showed between 3.3 and 7.4 at. % metal fraction Si incorporated into all studied coatings depending on cathode Si composition. The incorporated Si content does not change significantly with different oxygen flows covering a wide range of deposition conditions from low to high O-2 flow during growth. The addition of Si promotes the metastable B1-like cubic structure over the thermodynamically stable corundum structure. The hardness determined by nanoindentation of the as-deposited coatings is slightly reduced upon Si incorporation as well as upon increased Al content. Si is found enriched in droplets but can also be found at a lower content, evenly spread, without visible segregation at the similar to 5 nm scale, in the actual oxide coating. The positive effect of improved cathode erosion upon Si incorporation has to be balanced against the promotion of the metastable B1-like structure, having lower room temperature hardness and inferior thermal stability compared to the corundum structure. Published by the AVS.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
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Landälv, Ludvig, ...
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Gothelid, Emmanu ...
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Jensen, Jens, 19 ...
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Greczynski, Grze ...
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Lu, Jun, 1962-
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Ahlgren, Mats
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visa fler...
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Hultman, Lars, P ...
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Alling, Björn, 1 ...
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Eklund, Per, Doc ...
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- NATURVETENSKAP
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och Kemi
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och Oorganisk kemi
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Journal of Vacuu ...
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Linköpings universitet