WFRF:(Wallenberg LR)
Search: WFRF:(Wallenberg LR) > Compositional infor...
- 15 of 43
- Previous record
- Next record
- To hitlist
Compositional information from amorphous Si-Ge multilayers using high-resolution electron microscopy imaging and direct digital recording
-
- Henning, P (author)
- Lund University
-
- Wallenberg, LR (author)
- Lund University,Lunds universitet,Centrum för analys och syntes,Kemiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Centre for Analysis and Synthesis,Department of Chemistry,Departments at LTH,Faculty of Engineering, LTH
-
- Jarrendahl, K (author)
- Linköping University
- show more...
- show less...
- (creator_code:org_t)
- 1996
- 1996
- English 15 s.
- In: Ultramicroscopy. - 0304-3991. ; 66:3-4, s. 221-235
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- A simple method for extracting compositional information from high-resolution electron microscopy images of an amorphous two-element system using a slow-scan CCD camera has been developed. The method has been evaluated on amorphous Si/Ge multilayers. The characterisation of the multilayers provided information about thickness of the layers, maximum concentrations within the layers and elemental profiles across the boundaries. It was shown that the intensity profiles could be corrected for the wedge shape of the specimen and that the derived compositional profile was independent of average sample thickness variation within the range of the cross-section sample thickness.The results have been compared to analysis performed by Auger electron spectroscopy depth profiling on as-prepared multilayers as well as by energy-dispersive X-ray analysis and electron energy filtered images of cross-sections. The proposed HREM image contrast evaluation method gave spatial resolution in chemical analysis across the thin layers comparable in accuracy to the other methods, whereas the oscillation amplitude for the concentration is slightly less due to specimen preparation artifacts.
Subject headings
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
Find in a library
- Ultramicroscopy (Search for host publication in LIBRIS)
To the university's database
- 15 of 43
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Henning, P
- Wallenberg, LR
- Jarrendahl, K
- Hultman, L
- Falk, LKL
- Sundgren, JE
- About the subject
-
- NATURAL SCIENCES
- NATURAL SCIENCES
- and Chemical Science ...
- and Materials Chemis ...
- Articles in the publication
- Ultramicroscopy
- By the university
- Lund University
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
