Optical Far-Field Method with Subwavelength Accuracy for the Determination of Nanostructure Dimensions in Large-Area Samples.

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Fältnamn	Indikatorer	Metadata
000		04152naa a2200373 4500
001		oai:lup.lub.lu.se:f99233f6-fcf9-44e7-b369-975c1c00524c
003		SwePub
008		160401s2013 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
024	7	a https://lup.lub.lu.se/record/38050472 URI
024	7	a https://doi.org/10.1021/nl400811q2 DOI
040		a (SwePub)lu
041		a engb eng
042		9 SwePub
072	7	a art2 swepub-publicationtype
072	7	a ref2 swepub-contenttype
100	1	a Anttu, Nicklasu Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-naa
245	1 0	a Optical Far-Field Method with Subwavelength Accuracy for the Determination of Nanostructure Dimensions in Large-Area Samples.
264		c 2013-05-02
264	1	b American Chemical Society (ACS),c 2013
520		a The physical, chemical, and biological properties of nanostructures depend strongly on their geometrical dimensions. Here we present a fast, noninvasive, simple-to-perform, purely optical method that is capable of characterizing nanostructure dimensions over large areas with an accuracy comparable to that of scanning electron microscopy. This far-field method is based on the analysis of unique fingerprints in experimentally measured reflectance spectra using full three-dimensional optical modeling. We demonstrate the strength of our method on large-area (millimeter-sized) arrays of vertical InP nanowires, for which we simultaneously determine the diameter and length as well as cross-sample morphological variations thereof. Explicitly, the diameter is determined with an accuracy better than 10 nm and the length with an accuracy better than 30 nm. The method is versatile and robust, and we believe that it will provide a powerful and standardized measurement technique for large-area nanostructure arrays suitable for both research and industrial applications.
650	7	a TEKNIK OCH TEKNOLOGIERx Nanoteknikx Nanoteknik0 (SwePub)210012 hsv//swe
650	7	a ENGINEERING AND TECHNOLOGYx Nano-technologyx Nano-technology0 (SwePub)210012 hsv//eng
650	7	a NATURVETENSKAPx Fysikx Den kondenserade materiens fysik0 (SwePub)103042 hsv//swe
650	7	a NATURAL SCIENCESx Physical Sciencesx Condensed Matter Physics0 (SwePub)103042 hsv//eng
700	1	a Heurlin, Magnusu Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-mhi
700	1	a Borgström, Magnusu Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-mbo
700	1	a Pistol, Mats-Eriku Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-mpi
700	1	a Xu, Hongqiu Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-hxu
700	1	a Samuelson, Larsu Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH4 aut0 (Swepub:lu)ftf-lsa
710	2	a Fasta tillståndets fysikb Fysiska institutionen4 org
773	0	t Nano Lettersd : American Chemical Society (ACS)g 13:6, s. 2662-2667q 13:6<2662-2667x 1530-6992x 1530-6984
856	4	u http://dx.doi.org/10.1021/nl400811qy FULLTEXT
856	4 8	u https://lup.lub.lu.se/record/3805047
856	4 8	u https://doi.org/10.1021/nl400811q

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Av författaren/redakt...: Anttu, Nicklas; Heurlin, Magnus; Borgström, Magnu ...; Pistol, Mats-Eri ...; Xu, Hongqi; Samuelson, Lars

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TEKNIK OCH TEKNOLOGIER: TEKNIK OCH TEKNO ...; och Nanoteknik; och Nanoteknik

NATURVETENSKAP: NATURVETENSKAP; och Fysik; och Den kondenserade ...

Artiklar i publikationen: Nano Letters

Av lärosätet: Lunds universitet

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