Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors

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Badel, XavierKTH,Mikroelektronik och informationsteknik, IMIT (author)

Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors

Article/chapterEnglish2004

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IEEE,2004
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LIBRIS-ID:oai:DiVA.org:kth-4959
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4959URI
https://doi.org/10.1109/TNS.2004.829579DOI
https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-2166URI
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-47387URI

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Language:English
Summary in:English

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Subject category:ref swepub-contenttype
Subject category:art swepub-publicationtype

Notes

QC 20100831. Konferens: Nuclear Science Symposium/Medical Imaging Conference/13th International Workshop on Room-Temperature Semiconductor X-and Gamma-Ray Dectectors/Symposium on Nuclear Power Systems, Portland, OR, OCT 19-25, 2003.
Nuclear Science Symposium/Medical Imaging Conference/13th International Workshop on Room-Temperature Semiconductor X-and Gamma-Ray Dectectors/Symposium on Nuclear Power Systems, oct 19-25, 2003, Portland, OR
QC 20111109
Silicon charge-coupled devices (CCDs) covered with a scintillating film are now available on the market for use in digital medical imaging. However, these devices could still be improved in terms of sensitivity and especially spatial resolution by coating the CCD with an array of scintillating waveguides. In this paper, such waveguides were fabricated by first etching pores in silicon, then performing metallization or oxidation of the pore walls and finally filling the pores with CsI(TI). The resulting structures were observed using scanning electron microscopy and tested under X-ray exposure. Theoretical efficiencies of macropore arrays filled with CsI(TI) were also calculated, indicating that the optimal pore depth for metallized macropore arrays is about 80 mum while it is around 350 mum for oxidized ones. This result, together with the roughness of the metal coating, explains why lower SNR values were measured with the metallized macropores. Indeed, the macropore arrays had depths in the range of 210-390 mum, which is favorable to oxidized structures.

Subject headings and genre

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
CsI(TI)
Pixellated detectors
Scintillating wave-guides
X-ray imaging
Cesium compounds
Imaging techniques
Metallizing
Optical resolving power
Optical waveguides
Phosphors
Scanning electron microscopy
Signal to noise ratio
Silicon
X rays
CsI(Tl)
Pixellated detectors
Scintillating waveguides
X-ray imaging
Charge coupled devices
Electrophysics
Elektrofysik
Electrical engineering, electronics and photonics

Added entries (persons, corporate bodies, meetings, titles ...)

Linnros, JanKTH,Mikroelektronik och informationsteknik, IMIT(Swepub:kth)u1t79mee (author)
Kleimann, P.LENAC, Univ.́ Claude Bernard Lyon-I, Villeurbanne (author)
Norlin, BörjeMittuniversitetet,Institutionen för informationsteknologi och medier (-2013)(Swepub:miun)bornor (author)
Koskiahde, E.Metorex International Oy, Espoo (author)
Valpas, K.Metorex International Oy, Espoo (author)
Nenonen, S.Metorex International Oy, Espoo (author)
Petersson, StureKTH,Mikroelektronik och informationsteknik, IMIT,Department of Microelectronics, Roy. Inst. of Technology of Sweden, Kista(Swepub:miun)stupet (author)
Fröjdh, ChristerMittuniversitetet,Institutionen för informationsteknologi och medier (-2013)(Swepub:miun)chrfro (author)
KTHMikroelektronik och informationsteknik, IMIT (creator_code:org_t)

Related titles

In:IEEE Transactions on Nuclear Science: IEEE51:3, s. 1001-1005, s. 1006-10100018-94991558-1578
In:2003 IEEE NUCLEAR SCIENCE SYMPOSIUM, CONFERENCE RECORD, VOLS 1-5: IEEE51:3, s. 1001-1005, s. 1006-1010

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By the author/editor: Badel, Xavier; Linnros, Jan; Kleimann, P.; Norlin, Börje; Koskiahde, E.; Valpas, K.; show more...; Nenonen, S.; Petersson, Sture; Fröjdh, Christer; show less...

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ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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