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Search: L773:0277 786X OR L773:1996 756X OR L773:9781510609594 > (2020-2024) > Thin-film UV VCSELs...

Thin-film UV VCSELs and LEDs by electrochemical etching

Haglund, Åsa, 1976 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Hjort, Filip, 1991 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Enslin, Johannes (author)
Technische Universität Berlin
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Bergmann, Michael Alexander, 1989 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Cobet, Munise (author)
Technische Universität Berlin
Cardinali, Giulia (author)
Technische Universität Berlin
Prokop, Nando (author)
Technische Universität Berlin
Persson, Lars, 1996 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Guttmann, Martin (author)
Technische Universität Berlin
Sulmoni, Luca (author)
Technische Universität Berlin
Lobo-Ploch, Neysha (author)
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Kolbe, Tim (author)
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Gustavsson, Johan, 1974 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Ciers, Joachim, 1991 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Wernicke, Tim (author)
Technische Universität Berlin
Kneissl, Michael (author)
Technische Universität Berlin
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 (creator_code:org_t)
2022
2022
English.
In: Proceedings of SPIE - The International Society for Optical Engineering. - 0277-786X .- 1996-756X. ; PC12022
Related links:
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  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • We will give an overview of state-of-the-art results and challenges to achieve high-performing III-nitride vertical-cavity surface-emitting lasers (VCSELs), with a particular focus on the requirements to push the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by electrochemical etching enabled the world’s first UV-B VCSEL. The use of dielectric mirrors yielded lasers with a very temperature-stable emission wavelength thanks to the negative thermo-optic coefficient of the mirrors. We have used the same etch methodology to also lift-off fully processed LEDs from their growth substrate to improve the light extraction efficiency.

Subject headings

NATURVETENSKAP  -- Fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Annan materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Other Materials Engineering (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)

Keyword

led
vcsel
electrochemical etching

Publication and Content Type

kon (subject category)
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