Atom probe tomography field evaporation characteristics and compositional corrections of ZrB2

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Fältnamn	Indikatorer	Metadata
000		04769naa a2200517 4500
001		oai:research.chalmers.se:e98e7a21-aeb5-48bf-88f8-ac097ff36cfb
003		SwePub
008		191018s2019 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
009		oai:DiVA.org:liu-160356
024	7	a https://research.chalmers.se/publication/5130182 URI
024	7	a https://doi.org/10.1016/j.matchar.2019.1098712 DOI
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-1603562 URI
040		a (SwePub)cthd (SwePub)liu
041		a engb eng
042		9 SwePub
072	7	a art2 swepub-publicationtype
072	7	a ref2 swepub-contenttype
100	1	a Engberg, David L. J.,d 1986-u Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten4 aut0 (Swepub:liu)daven37
245	1 0	a Atom probe tomography field evaporation characteristics and compositional corrections of ZrB2
264	1	b Elsevier BV,c 2019
520		a The microstructure of stoichiometric ZrB2.0 and B over-stoichiometric ZrB2.5 thin films has been studied using atom probe tomography (APT), X-ray diffraction, and transmission electron microscopy. Both films consist of columnar ZrB2 grains with AlB2-type crystal structure. The narrow stoichiometry range of ZrB2 results in the presence of separate disordered B-rich boundaries even in ZrB2.0. At higher average B content, specifically ZrB2.5, the formation of a continuous network around the sides of the ZrB2 columns is promoted. In addition, the APT field evaporation characteristics of ZrB2 and its influence on the measured local composition has been studied and compared to the average composition from elastic recoil detection analysis (ERDA). Differences in the measured average compositions of the two techniques are explained by the APT detector dead-time/space. A new pile-up pairs correction procedure based on co-evaporation correlation data was thus employed here for the APT data and compared with the 10B-method (the B equivalence of the 13C-method), as well as the combination of both methods. In ZrB2.0, all of the applied compositional correction methods were found to reduce the compositional difference when appropriate isotopic abundances were used. In ZrB2.5, the inhomogeneity of the film likely increased the local APT composition to such an extent that even conservative correction procedures overestimated the B content compared to the ERDA reference. The strengths of the pile-up pairs correction compared the 10B and the combined methods are higher precision, due to it being less dependent on the accuracy of estimated isotopic abundances, and that the correction itself is not dependent on careful background correction of the mass spectrum.
650	7	a NATURVETENSKAPx Kemix Oorganisk kemi0 (SwePub)104042 hsv//swe
650	7	a NATURAL SCIENCESx Chemical Sciencesx Inorganic Chemistry0 (SwePub)104042 hsv//eng
650	7	a NATURVETENSKAPx Kemix Materialkemi0 (SwePub)104032 hsv//swe
650	7	a NATURAL SCIENCESx Chemical Sciencesx Materials Chemistry0 (SwePub)104032 hsv//eng
650	7	a NATURVETENSKAPx Kemix Annan kemi0 (SwePub)104992 hsv//swe
650	7	a NATURAL SCIENCESx Chemical Sciencesx Other Chemistry Topics0 (SwePub)104992 hsv//eng
650	7	a NATURVETENSKAPx Fysik0 (SwePub)1032 hsv//swe
650	7	a NATURAL SCIENCESx Physical Sciences0 (SwePub)1032 hsv//eng
653		a Field evaporation characteristics of borides
653		a Transition metal diborides
653		a Atom probe tomography (APT)
653		a Elastic recoil detection analysis (ERDA)
653		a Zirconium diboride (ZrB ) 2
653		a Compositional correction procedures
700	1	a Tengdelius, Lina,d 1986-u Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten4 aut0 (Swepub:liu)linte49
700	1	a Högberg, Hans,d 1968-u Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten4 aut0 (Swepub:liu)hanho47
700	1	a Thuvander, Mattias,d 1968u Chalmers tekniska högskola,Chalmers University of Technology,Department of Physics, Chalmers University of Technology, Göteborg, Sweden4 aut0 (Swepub:cth)matthu
700	1	a Hultman, Lars,c Professor,d 1960-u Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten4 aut0 (Swepub:liu)larhu75
710	2	a Linköpings universitetb Tunnfilmsfysik4 org
773	0	t Materials Characterizationd : Elsevier BVg 156q 156x 1044-5803x 1873-4189
856	4	u http://liu.diva-portal.org/smash/get/diva2:1352748/FULLTEXT01
856	4	u https://liu.diva-portal.org/smash/get/diva2:1352748/FULLTEXT01.pdfx primaryx Raw objecty fulltext:postprint
856	4 8	u https://research.chalmers.se/publication/513018
856	4 8	u https://doi.org/10.1016/j.matchar.2019.109871
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-160356

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