Photoluminescence properties of ZnO:Al films deposited on flexible PET substrate by RF reactive magnetron sputtering

• Aluminium-doped ZnO (AZO) thin films have been deposited on flexible polyethylene terephthalate (PET) substrate by RF reactive magnetron sputtering process at low substrate temperature (room -100 degrees C), and their photoluminescence (PL) behavior at room temperature and the influence of O-2:Ar ratio, substrate temperature, and deposition time were investigated. The strong near band-edge UV emission and the weak blue emission were observed, while the defect-related deep-level green emission was nearly absent, indicating that high optical quality AZO films, grown on flexible PET substrate, were obtained using the RF reactive magnetron sputtering technique. The origin of the emissions is discussed.

Subject headings

NATURVETENSKAP  -- Kemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences (hsv//eng)

Keyword

ZnO:Al (AZO)

Thin films

Flexible PET

RF reactive magnetron sputtering

Photoluminescence

Publication and Content Type

ref (subject category)

art (subject category)