Thermal detector with integrated absorber structure for mid-IR gas detection

• Measurement of the concentration of greenhouse gases, such as carbon dioxide(CO 2 ) and methane (CH 4 ), in the atmosphere has received significant attention in the last few decades. This work focusses on the development of high-performance thermopile detectors for use with the non-dispersive infrared (NDIR) measurements of such gases. The performance of the thermopile detectors could effectively be increased by selecting membrane materials with a low thermal conductivity value and an efficient infrared (IR) absorbing material and by selecting the materials with high Seebeck coefficient values. Graphite black paint can be used as a radiation absorber, as it has high absorption (80—93%) for a wide spectral range (2.5 μm — 20 μm). By using spray paint or a paint brush, the application of the absorber is simple and fast. However, the control over the processing process suffers with these simple methods. The thermal capacitance of the detector will rapidly increase due to uneven distribution and unknown thickness of the absorber, although the response of the thermopile detector will be maximum due to high absorption; however, the response time (τ th )for the detector will be longer.In order to improve the performance, IR absorbers have been designed to utilise the membrane (SU-8 epoxy) of the detector as an active part of the IR absorber. This utilisation of the SU-8 epoxy membrane will result in a maximum detector sensitivity and a minimum increase in both the thermal capacitance and thermal conductance of the thermopile detector. Absorber structures, based on SU-8 epoxy, with a narrow absorption band at 4.26 µm and a wider multi-layered absorption band at 3-6 µm, were designed, simulated, and fabricated, and their integration into the membrane of thermopile detectors have been presented. The response of the thermopile detector could also be increased by using materials with high Seebeck coefficient [1] values such as semiconductor materials, as they have higher Seebeckvalues compared to the metals. In the thesis, molybdenum disulfide (MoS 2 ) flakes were characterised, and Seebeck values were estimated through a measurement setup as a function of temperature difference (ΔT). The fabricated thermopile detectors were characterised, and the response time(τ th ) of a thermocouple with a multi-layered absorber structure has been estimated to be 21 ms. The detector has shown high responsivity value in the wavelength range of 3 µm – 4.5 µm, which is used for CO 2 and CH 4 detection. The thermopile detector was evaluated for CO 2 gas through a long-path-length NDIR platform. The results show that the evaluated thermopile could be used for the measurement of gas concentration down to levels of a few parts per million (ppm) by using the long-path-length NDIR platform.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Thermal detectors

Thermopile detectors

Infrared absorbers

SU-8 epoxy

Interferometric and Multi-layered absorber

Seebeck coefficient

Molybdenum di-sulfide

Publikations- och innehållstyp

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