Sökning: WFRF:(Kawasaki H) > Pulsed Laser Deposi...
Fältnamn | Indikatorer | Metadata |
---|---|---|
000 | 02489naa a2200421 4500 | |
001 | oai:DiVA.org:kth-11137 | |
003 | SwePub | |
008 | 090922s2008 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-111372 URI |
024 | 7 | a https://doi.org/10.1016/j.tsf.2008.05.0102 DOI |
040 | a (SwePub)kth | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a ref2 swepub-contenttype |
072 | 7 | a art2 swepub-publicationtype |
100 | 1 | a Dzibrou, Dzmitryu KTH,Mikroelektronik och tillämpad fysik, MAP4 aut0 (Swepub:kth)u1v9n7cn |
245 | 1 0 | a Pulsed Laser Deposited TiO2Films :b Tailoring optical properties |
264 | 1 | b Elsevier BV,c 2008 |
338 | a print2 rdacarrier | |
500 | a QC 20100928 | |
520 | a TiO2 amorphous films have been pulsed laser deposited onto glass substrates. Film characterization by X-ray diffraction, atomic force microscopy and transmission spectroscopy was performed with the aim of extracting the information on the film crystalline structure, surface roughness and optical properties. Three methods for improving film optical performance have been employed, namely deposition at elevated temperatures, post-annealing in thermodynamically equilibrium conditions and rapid thermal annealing (RTA). The best characteristics were achieved in the case of the film subjected to RTA at 500 °C: refractive index n = 2.53, absorption coefficient α = 404 cm- 1 at λ = 550 nm and rms surface roughness as low as 0.6 nm. The results obtained were found to be one of the best published so far. | |
650 | 7 | a NATURVETENSKAPx Fysikx Atom- och molekylfysik och optik0 (SwePub)103022 hsv//swe |
650 | 7 | a NATURAL SCIENCESx Physical Sciencesx Atom and Molecular Physics and Optics0 (SwePub)103022 hsv//eng |
653 | a Absorption coefficient | |
653 | a Anatase | |
653 | a Pulsed laser deposition | |
653 | a Rapid thermal annealing | |
653 | a Refractive index | |
653 | a Rutile | |
653 | a Surface roughness | |
653 | a Optics | |
653 | a Optik | |
700 | 1 | a Grishin, Alexanderu KTH,Mikroelektronik och tillämpad fysik, MAP4 aut0 (Swepub:kth)u179x9xt |
700 | 1 | a Kawasaki, H.4 aut |
710 | 2 | a KTHb Mikroelektronik och tillämpad fysik, MAP4 org |
773 | 0 | t Thin Solid Filmsd : Elsevier BVg 516:23, s. 8697-8701q 516:23<8697-8701x 0040-6090x 1879-2731 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-11137 |
856 | 4 8 | u https://doi.org/10.1016/j.tsf.2008.05.010 |
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