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Characterization of 4H-SiC nMOSFETs in harsh environments, high-temperature and high gamma-ray radiation

Kuroki, S. I. (author)
Nagatsuma, H. (author)
de Silva, M. (author)
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Ishikawa, S. (author)
Maeda, T. (author)
Sezaki, H. (author)
Kikkawa, T. (author)
Makino, T. (author)
Ohshima, T. (author)
Östling, Mikael (author)
KTH,Integrerade komponenter och kretsar
Zetterling, Carl-Mikael (author)
KTH,Integrerade komponenter och kretsar
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 (creator_code:org_t)
Trans Tech Publications Ltd, 2016
2016
English.
In: 16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015. - : Trans Tech Publications Ltd. - 9783035710427 ; , s. 864-867
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • Characteristics of 4H-SiC nMOSFETs with arsenic-doped S/D and NbNi silicide contacts in harsh environments of high-temperature up to 450°C, and high gamma-ray radiation up to over 100 Mrad, were investigated. At high temperature, field effect mobility increased as proportional to T3/2, and threshold voltage was shifted with temperature coefficients of -4.3 mV/K and -2.6 mV/K for oxide thicknesses of 10 nm and 20 nm, respectively. After Co60 gamma-ray exposure of 113 Mrad, the field effect mobility was varied within 8% for oxide thickness of 10 nm, however for 20 nm oxide thickness, this variation was 26%. The threshold voltage shifts were within 6%.

Subject headings

NATURVETENSKAP  -- Fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Keyword

High gamma-ray radiation
High-temperature
SiC-nMOSFET
Characterization
Electric breakdown
MOSFET devices
Silicides
Silicon carbide
Threshold voltage
Field-effect mobilities
Gamma ray radiation
Gamma-ray exposure
Harsh environment
High temperature
NMOSFET
Temperature coefficient
Threshold voltage shifts
Gamma rays

Publication and Content Type

ref (subject category)
kon (subject category)

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