Scalable Fabrication of Edge Contacts to 2D Materials: Implications for Quantum Resistance Metrology and 2D Electronics

Scalable Fabrication of Edge Contacts to 2D Materials : Implications for Quantum Resistance Metrology and 2D Electronics

Shetty, Naveen, 1988 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

He, Hans (author): RISE,Mätteknik,Chalmers University of Technology, Sweden,Chalmers tekniska högskola,RISE Research Institutes of Sweden,Chalmers Univ Technol, Sweden; RISE Res Inst Sweden, Sweden

Mitra, Richa, 1992 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Huhtasaari, Johanna, 1999 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Iordanidou, Konstantina, 1989 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Wiktor, Julia, 1988 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Kubatkin, Sergey, 1959 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Dash, Saroj Prasad, 1975 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Yakimova, Rositsa (author): Linköpings universitet,Halvledarmaterial,Tekniska fakulteten,Linköping University, Sweden

Zeng, Lunjie, 1983 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Olsson, Eva, 1960 (author): Chalmers University of Technology, Sweden,Chalmers tekniska högskola,Chalmers Univ Technol, Sweden

Lara Avila, Samuel, 1983 (author): Chalmers University of Technology, Sweden; NPL National Physical Laboratory, UK,Chalmers tekniska högskola,National Physical Laboratory (NPL),Chalmers Univ Technol, Sweden; Natl Phys Lab, England

(creator_code:org_t)

2023-03-30
2023
English.
In: ACS Applied Nano Materials. - : American Chemical Society. - 2574-0970. ; 6:7, s. 6292-

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Abstract Subject headings

We report a reliable and scalable fabrication method for producing electrical contacts to two-dimensional (2D) materials based on the tri-layer resist system. We demonstrate the applicability of this method in devices fabricated on epitaxial graphene on silicon carbide (epigraphene) used as a scalable 2D material platform. For epigraphene, data on nearly 70 contacts result in median values of the one-dimensional (1D) specific contact resistances ρc ∼ 67 Ω·μm and follow the Landauer quantum limit ρc ∼ n-1/2, consistently reaching values ρc < 50 Ω·μm at high carrier densityn. As a proof of concept, we apply the same fabrication method to the transition metal dichalcogenide (TMDC) molybdenum disulfide (MoS2). Our edge contacts enable MoS2 field-effect transistor (FET) behavior with an ON/OFF ratio of >106 at room temperature (>109 at cryogenic temperatures). The fabrication route demonstrated here allows for contact metallization using thermal evaporation and also by sputtering, giving an additional flexibility when designing electrical interfaces, which is key in practical devices and when exploring the electrical properties of emerging materials. © 2023 The Authors.

NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Textil-, gummi- och polymermaterial (hsv//swe)
ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Textile, Rubber and Polymeric Materials (hsv//eng)
TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)

By the author/editor: Shetty, Naveen, ...; He, Hans; Mitra, Richa, 19 ...; Huhtasaari, Joha ...; Iordanidou, Kons ...; Wiktor, Julia, 1 ...; show more...; Kubatkin, Sergey ...; Dash, Saroj Pras ...; Yakimova, Rosits ...; Zeng, Lunjie, 19 ...; Olsson, Eva, 196 ...; Lara Avila, Samu ...; show less...

About the subject

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Condensed Matter ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Materials Engine ...; and Textile Rubber a ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Materials Engine ...; and Other Materials ...

By the university: RISE; Chalmers University of Technology; Linköping University

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