L773:0042 207X OR L773:1879 2715
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Radio frequency powered spiral hollow cathodes
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- Bardos, Ladislav (author)
- Uppsala universitet,Elektricitetslära,The Plasma Group
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- Barankova, Hana (author)
- Uppsala universitet,Elektricitetslära,The Plasma Group
- (creator_code:org_t)
- PERGAMON-ELSEVIER SCIENCE LTD, 2020
- 2020
- English.
- In: Vacuum. - : PERGAMON-ELSEVIER SCIENCE LTD. - 0042-207X .- 1879-2715. ; 175
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- Potential usage of the radio frequency (RF) spiral hollow electrodes in comparison with the compact hollow cathodes was examined for coating and other surface processing treatments. Most properties were found similar to the compact RF hollow cathodes. The non-conventional shapes of spiral hollow cathodes can be suitable for the inner coating in narrow tubes and pipes. Small diameter spiral cathodes can generate focused high-density ion flux capable of rapid etching of the substrate.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Hollow cathode
- Spiral hollow cathode
- Radio frequency power
- Coating
- Ion etching
- Atmospheric plasma
Publication and Content Type
- ref (subject category)
- art (subject category)
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- Vacuum
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