L773:0042 207X OR L773:1879 2715
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Ion-assisted selective deposition of aluminium for via-hole interconnections
- Barklund, AM (author)
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- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Katardjiev, IV (author)
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- Nender, C (author)
- Carlsson, P (author)
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- (creator_code:org_t)
- 1993
- 1993
- English.
- In: Vacuum. - 0042-207X .- 1879-2715. ; 44:3-4, s. 197-201
- Journal article (peer-reviewed)
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- Barklund, AM
- Berg, Sören
- Katardjiev, IV
- Nender, C
- Carlsson, P
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- Vacuum
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- Uppsala University
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