WFRF:(Ivanov Ivan Gueorguiev 1955 )
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Assessment of H-intercalated graphene for microwave FETs through material characterization and electron transport studies
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- Winters, Michael, 1986 (author)
- Chalmers tekniska högskola,Chalmers University of Technology,Chalmers, Sweden
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- Habibpour, Omid, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology,Chalmers, Sweden
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- Gueorguiev Ivanov, Ivan (author)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- (creator_code:org_t)
- Elsevier BV, 2015
- 2015
- English.
- In: Carbon. - : Elsevier BV. - 0008-6223 .- 1873-3891. ; 81:1, s. 96-104
- Journal article (peer-reviewed)
Abstract
Subject headings
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- Epitaxial graphene is grown on semi-insulating (SI) 4H-SiC in a hot wall CVD reactor by graphitization and in-situ intercalation with (H)ydrogen. A holistic material characterization is performed in order to ascertain the number of layers, layer uniformity, and electron transport properties of the epi-layers via electronic test structures and Raman spectroscopy. Bilayer graphene field effect transistors (GFETs) are fabricated using a full electron beam lithography (EBL) process which is optimized for low contact resistances of r(c)
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Kemi -- Fysikalisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Physical Chemistry (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- NATURVETENSKAP -- Kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences (hsv//eng)
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- Carbon
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- Linköping University
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